Wuhan Micro-Environment Control Technology Co., Ltd
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News

Precision Temperature-Controlled Air Conditioner | WHAC

MECT’s WHAC uses facility-supplied cooling water to deliver precision air-temperature control with stability of up to ±5 mK.

Precision Temperature-Controlled Air Conditioner | RHAC

MECT’s RHAC provides precision air-temperature control with stability of up to ±5 mK when integrated with a modular cleanroom.

Micro-Environment Control Solution for Lithography Systems

MECT’s integrated solution provides precise air and water temperature control, thermal monitoring, and heat extraction for lithography R&D and testing.

Micro-Environment Control Solution for Semiconductor Equipment

MECT’s integrated system simultaneously controls air and water temperatures, delivering ±5 mK stability for precision semiconductor equipment.

120-Channel Temperature Field Data Acquisition System

MECT’s 120-channel system provides real-time, high-precision temperature-field monitoring with accuracy of up to ±0.5 mK.

Water Temperature Control Unit | WTCU

MECT’s WTCU delivers precise water-temperature control with outlet stability of up to ±2 mK and customizable flow capacity.

Modular Cleanroom Applications (I) | Dedicated Solution for Precision Motion Stages

MECT’s modular cleanroom solution combines overall and localized airflow control to deliver high temperature stability for precision motion stages.

Modular Cleanroom | Removable Ceiling

MECT’s removable cleanroom ceiling provides flexible overhead access for the efficient lifting and installation of heavy equipment.

Modular Cleanroom | Enclosure Relocation

MECT’s movable cleanroom enclosure creates sufficient clearance for the safe and efficient lifting and installation of heavy equipment.

Modular Cleanroom | A Quick Overview

Discover MECT’s modular cleanroom solution, featuring rapid installation, reusable construction, ISO Class 1 cleanliness, and high-precision environmental control.