Wuhan Micro-Environment Control Technology Co., Ltd
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All-Aluminum Water Cooling Jacket

2026-09-07

Wuhan MECT Successfully Develops “All-Aluminum Water Cooling Jacket”

MECT

  In projection lithography systems, the temperature stability of the objective lens directly determines exposure accuracy and chip yield. As a critical barrier that isolates and dampens external temperature fluctuations, the water cooling jacket's thermal response speed and structural design are of paramount importance. Traditional objective lens water cooling jackets are mostly made of stainless steel, which—limited by the material's thermal conductivity and inherent weight—struggles to meet the stringent demands of high-end lithography for extreme temperature control and high dynamic stability.

  Recently, Wuhan Micro-Environment Control Technology Co., Ltd. (hereinafter referred to as "Wuhan MECT") has successfully overcome key manufacturing challenges in all-aluminum water cooling jackets and officially launched its "All-Aluminum Water Cooling Jacket" product for projection lithography objective lenses.



Core Advantages and Technical Value


 01 

 Superior Thermal Conductivity for Faster Temperature Response

Fully leveraging the high thermal conductivity of aluminum alloys, the product delivers significantly improved heat transfer efficiency, enabling faster suppression of ambient temperature fluctuations and providing a high-precision steady-temperature barrier for the objective lens system.


 02 

  Significant Weight Reduction for Optimized Equipment Structure

Compared to conventional stainless steel designs, the all-aluminum solution substantially reduces component weight, greatly minimizing both static and dynamic loads on the lithography objective lens support structure. This reduces the impact of motion inertia, contributing to a more compact equipment footprint and more stable operation.


 03 

  Advanced Manufacturing Processes for High Reliability and Long Service Life

To address industry bottlenecks such as deformation during aluminum alloy processing and the difficulties of complex flow channel welding and sealing, Wuhan MECT has developed specialized process innovations and precision machining controls, achieving manufacturing standards that ensure high cleanliness, high reliability, and extended service life.


 04 

 Integrated Structural Co-Optimization of Thermal and Dynamic Performance

With deep expertise in collaborative thermal and mechanical design, Wuhan MECT offers full-process customized services—from flow channel thermal simulation and structural topology optimization to precision manufacturing—tailored to specific customer equipment models and process requirements. This ensures an optimal balance between temperature control performance and mechanical integrity.