In projection lithography systems, the temperature stability of the objective lens directly determines exposure accuracy and chip yield. As a critical barrier that isolates and dampens external temperature fluctuations, the water cooling jacket's thermal response speed and structural design are of paramount importance. Traditional objective lens water cooling jackets are mostly made of stainless steel, which—limited by the material's thermal conductivity and inherent weight—struggles to meet the stringent demands of high-end lithography for extreme temperature control and high dynamic stability.
Recently, Wuhan Micro-Environment Control Technology Co., Ltd. (hereinafter referred to as "Wuhan MECT") has successfully overcome key manufacturing challenges in all-aluminum water cooling jackets and officially launched its "All-Aluminum Water Cooling Jacket" product for projection lithography objective lenses.