Wuhan MECT Provides Dynamic Performance Solutions for Vertical Interferometer Micro-Environment Control

2026-08-26

Wuhan MECT Provides Dynamic Performance Solutions for Vertical Interferometer Micro-Environment Control

MECT

In ultra-precision optical manufacturing and inspection, the vertical interferometer is a critical tool for measuring optical surface form (figure). As measurement accuracy requirements continue to tighten—with repeatability needing to be better than 0.5 nm or even higher—minor temperature fluctuations, airflow disturbances, and air refractive index noise in the measurement optical path have become the core bottlenecks limiting interferometer performance.

I. From "Empty-State & Static-State" to the "Dynamic Operating Conditions" That Customers Truly Care About

Wuhan MECT has previously launched a micro-environment control system specifically designed for vertical interferometers, and has verified its ability to address temperature control and noise reduction under two conditions:

Empty-State Performance：

MECT

The measurement chamber contains no test piece.

Static-State Performance：

MECT

The measurement chamber contains a test piece, but the interferometer is not in continuous operation.

However, through ongoing customer interactions and on-site usage, we have come to clearly understand that what customers truly need is dynamic performance under actual measurement conditions—that is, measurement repeatability while the workpiece is in the chamber and the system is in continuous operation.

II. Factors Limiting Dynamic Performance and Structural Thermal Analysis

Measurements and analysis indicate that measurement fluctuations during continuous interferometer operation are influenced not only by external airflow and micro-environment control air supply quality, but also by the interferometer's own structural thermal characteristics.

In the mechanical and opto-mechanical designs of some existing vertical interferometers, the thermal conduction and heat dissipation paths of light sources, electrical controls, drive motors, and structural components have not been fully optimized. During operation, localized heat sources within the instrument induce asymmetrical thermal deformation and micro-convection inside the measurement chamber. External temperature control alone cannot fully offset these internal thermal disturbances.

III. Corrective Measures and Performance Commitment

To thoroughly resolve repeatability issues under operating conditions, Wuhan MECT does not shy away from addressing the instrument's inherent structural thermal challenges. We work collaboratively with customers to provide a systematic improvement solution that addresses both environmental control and thermal optimization of the instrument itself:

Refined Environmental Control Within the Chamber

· Further improve spatial temperature uniformity and long-term temperature stability inside the vertical interferometer measurement chamber.

· Optimize airflow distribution within the chamber, control micro-airflow uniformity and air noise, and reduce refractive index fluctuations.

Collaborative Thermal Optimization of the Interferometer Itself

· Provide targeted recommendations for thermal insulation, heat conduction, and localized heat extraction for internal heat-generating components.

· Assist customers in optimizing thermal conduction paths within the opto-mechanical structure to reduce internal thermal disturbance sources at their origin.

Performance Commitment

· Through the synergistic implementation of micro-environment control and structural thermal optimization, we are committed to improving measurement repeatability under actual continuous operating conditions to better than 0.1 nm.

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Wuhan MECT Provides Dynamic Performance Solutions for Vertical Interferometer Micro-Environment Control

2026-08-26